发明名称 INSPECTING APPARATUS FOR ELECTRODE WIRING
摘要 PROBLEM TO BE SOLVED: To provide an inspecting apparatus for a disconnection or a short- circuit of an electrode wiring such as electrode wiring or the like of a board for a plasma display panel. SOLUTION: An inspecting apparatus for an electrode wiring comprises a stage 110 fixedly placing a board 180 to transport the board to a predetermined inspecting region, a moving unit 120 provided separately substantially at a predetermined interval from a board surface to bridge a Y-direction width of the board on the stage along a Y-direction of a wiring direction of the wiring of the board to move in all range of the X-direction width of the board, and four probe heads 130 fixed to a predetermined Y-direction position by the moving unit to inspect presence or absence of a disconnection or a short-circuit of the wiring. The four heads 130 are independently controllable at the Y- direction position. Each head has a probe card 133 having a plurality of terminals at a predetermined pitch interval to be independently brought into electric contact with the plurality of the wirings, respectively of the board.
申请公布号 JPH11174108(A) 申请公布日期 1999.07.02
申请号 JP19970362295 申请日期 1997.12.12
申请人 DAINIPPON PRINTING CO LTD 发明人 MAEDA HIROMI
分类号 G01R31/02;H01J9/42;H01J11/10;H01J11/14 主分类号 G01R31/02
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