| 摘要 |
PROBLEM TO BE SOLVED: To produce a color filter having almost uniform film thickness by including a second exposure process for exposing a photosensitive material again after the photosensitive material is developed and before baked. SOLUTION: After development, the photosensitive material is irradiated with UV rays under specified exposure conditions for post-exposure (second exposure process) of a film 3r of a color phase R (process c). After the post- exposure, the film is subjected to post-baking by using an oven or the like to thermally polymerize and harden the film 3r of the color phase R (process d). By forming a color filter layer 3 in this procedure, the difference in film thickness of the color filter layer 3 is controlled to <=0.1 μm. Namely, by controlling the quantity of exposure light in the second exposure process for exposing again the photosensitive material after development and baking, spreading of the area where photopolymn. is completed in the film thickness direction in the photosensitive material can be controlled. Therefore, reduction in film thickness after baking can be controlled and the film thickness is made uniform. |
