PROJECTION ALIGNER,申请号JP19970341445-传众专利搜索

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发明名称	PROJECTION ALIGNER
摘要
申请公布号	JPH11176727(A)	申请公布日期	1999.07.02
申请号	JP19970341445	申请日期	1997.12.11
申请人	NIKON CORP	发明人	SHIRAISHI NAOMASA
分类号	G01B17/00;G03F7/20;H01L21/027;(IPC1-7):H01L21/027	主分类号	G01B17/00
代理机构		代理人
主权项
地址

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