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发明名称
DRY ETCHING EQUIPMENT
摘要
申请公布号
JPH11176811(A)
申请公布日期
1999.07.02
申请号
JP19970341052
申请日期
1997.12.11
申请人
SONY CORP
发明人
KAWASHIMA MASAHITO
分类号
C23F4/00;H01L21/302;H01L21/3065;(IPC1-7):H01L21/306
主分类号
C23F4/00
代理机构
代理人
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