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发明名称
SEMICONDUCTOR DEVICE PATTERN GENERATING METHOD AND DEVICE
摘要
申请公布号
JPH11176938(A)
申请公布日期
1999.07.02
申请号
JP19970337415
申请日期
1997.12.08
申请人
TOSHIBA CORP
发明人
MIMA KENJI
分类号
H01L21/82;G06F17/50;(IPC1-7):H01L21/82
主分类号
H01L21/82
代理机构
代理人
主权项
地址
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