| 摘要 |
PROBLEM TO BE SOLVED: To prevent electrodes or the like on a substrate side and on a vibrator side from coming into contact with each other and to stabilize the detection operation by providing a stopper for controlling the displacement amount of a vibrator. SOLUTION: In this angular velocity sensor 21, the vibrator 7 is displaced in the direction of arrow F corresponding to angular velocity around Z axis in the sate of vibrating the vibrator 7 in the direction of arrow A by a movable side driving electrode 8 and a fixed side driving electrode 12 and the displacement amount is detected by a movable side detection electrode 9 and a fixed side detection electrode 13. Then, the respective stoppers 22 provided on a substrate 2 control the displacement amount of the vibrator 7 in the direction of the arrow F in the state of being held at the same potential as the vibrator 7 by a connection part 23 and prevent the movable side driving electrode 8 and the fixed side driving electrode 12 and the movable side detection electrode 9 and the fixed side detection electrode 13 from respectively coming into contact. |
