| 摘要 |
<p>PROBLEM TO BE SOLVED: To avert adverse effects to an object by a method, wherein the precision in the position measurement of partition and an object as well as the reliability upon recognition by discrimination of cassette kinds are improved. SOLUTION: Various supporters for object discriminated by an object 3 and the displacement arrangement on a measurement plane E-E extend into measurement fluxes 11, 12 on the end side. Respective measurement fluxes 11, 12 are positioned in the region of only a single kind supporter 1. The end side of the supporter 1 is detected completely by the measurement fluxes 11, 12 on the measurement plane E-E on the extension part. This device is used for manufacturing an integrated circuit.</p> |
