| 摘要 |
PROBLEM TO BE SOLVED: To surely remove residual adhesives on the surface of commodities in a device for removing an unwanted resist pattern on a surface of commodities together with an adhesive tape by a method, wherein the resist pattern is separated by adhering the adhesive tape onto the commodities in which the resist pattern exists. SOLUTION: In a device for removing an unwanted resist pattern on the surface of a commodities by a method in which the resist pattern is separated by adhering an adhesive tape onto a substrate W in which the resist pattern exists, and an adhesive removal mechanism 13 is provided for processing the surface of the substrate W separated from the adhesive tape. As an effective adhesive removal mechanism 13 is a mechanism in which ozone is injected on the surface of the heated surface W, or a mechanism in which the surface of the heated substrate W, are irradiated with ultraviolet rays, or a mechanism in which ozone is injected in a surface of the heated substrate W and ultraviolet rays are irradiated. |
