| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for surely detecting a latent image and the exposure condition even if the change in shape of an exposed photosensitive material is small in a method of directly detecting the latent image and the exposure condition without development and baking process. SOLUTION: During Y-direction scanning, frictional force is produced between a probe 51 coming into contact with the surface of a specimen 1 and the surface of the specimen 1 to cause torsion of a cantilever 5. Whereupon, the reflecting direction of laser light is changed. A four-split photo detector 9 detects such a change and outputs the detection as a cantilever displacement signal to a controller 14. The controller 14 processes a control signal output to a tube scanner driver 10 and a cantilever displacement signal to display the frictional force distribution on the surface of the specimen 1 as image data on a display means 15. In a latent image position, the frictional force is changed so that the latent image position can be measured by measuring the frictional force distribution. |
