| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an electrostatic chuck the temperature of which can be controlled accurately. SOLUTION: An electrostatic chuck is equipped with a base 11 formed of composite material of metal aluminum and ceramics, an intermediate layer 13 of sintered ceramics brazed to the base 11 with a brazing layer 12, an electrode layer 14 provided to the intermediate layer 13, and a dielectric layer 15 provided to the electrode layer 14 through brazing, using the electrode layer 14 as a brazing material or through a flame spraying method. Through this setup, even if linear expansion coefficient difference is produced locally in the base 11 due to that the composite material of the base 11 not being mixed uniformly, a local thermal stress generated due to a temperature change can be relaxed by the intermediate layer 13.</p> |
