| 摘要 |
PROBLEM TO BE SOLVED: To reduce the wasteful wear in the frictional pretrial of a sliding part, and to attain long life by stopping a control means for driving, based on the speed detection information of a vibration-type actuator via phased deceleration within the allowable driving range of emergency stop in accordance with to the input of an emergency stop command. SOLUTION: Two drive circuits are used for driving a single vibration actuator 25, and each of pulses with phases of 0, 180, 90, and 270 degrees is added to primary-side MOSFETs 19-22 of transformers 23 and 24. A pulse with a phase difference of 90 degrees is outputted from a pulse formation circuit 7 to each of the two circuits. Based on speed information from a speed detection means 26 of an actuator (a body to be driven), the pulse control circuit 7 is controlled so as to reach the value of a speed command (target speed) by a speed control circuit 8. At emergency stop, a pulse width is changed so that the stop is made through the change in a plurality of pulse widths until the stop, thus reducing the speed difference between the actuators at stop action and the stresses given among the actuators and equipment. |
