| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and a device for manufacturing CdTe film for a solar battery of excellent quality at a low cost with excellent productivity. SOLUTION: In a formation of a CdTe film for the solar battery by a proximity sublimation method, gas containing either Cd or Te is supplied separately from gas introduction pipes 8, 15, 19 and 25 to the periphery of a CdTe semiconductor material and a substrate for CdTe film formation oppositely arranged closely to each other. Oxygen in an atmosphere is removed by making it react with Cd and Te, and a low oxygen density atmosphere is formed. |
