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经营范围
发明名称
SEMICONDUCTOR MANUFACTURING SYSTEM
摘要
申请公布号
JPH11176782(A)
申请公布日期
1999.07.02
申请号
JP19970346493
申请日期
1997.12.16
申请人
NEC CORP
发明人
MIYAZAWA ICHIRO
分类号
H01L21/304;(IPC1-7):H01L21/304
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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