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发明名称
POLISHING METHOD
摘要
申请公布号
JPH11176773(A)
申请公布日期
1999.07.02
申请号
JP19970343074
申请日期
1997.12.12
申请人
TOSHIBA CORP
发明人
NAKAMURA KENRO;YANO HIROYUKI
分类号
H01L21/304;C09G1/02;C09K3/14;H01L21/3105;(IPC1-7):H01L21/304
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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