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发明名称
CHARGED PARTICLE BEAM APPARATUS
摘要
申请公布号
JPH11176596(A)
申请公布日期
1999.07.02
申请号
JP19970336981
申请日期
1997.12.08
申请人
MITSUBISHI ELECTRIC CORP
发明人
NAKANISHI TETSUYA
分类号
H05H7/08;H05H7/10;H05H13/04;(IPC1-7):H05H13/04
主分类号
H05H7/08
代理机构
代理人
主权项
地址
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