| 摘要 |
PROBLEM TO BE SOLVED: To enable even a beginner without technical knowledge to easily enter parameters and to easily decide the reliability of a simulation calculation result. SOLUTION: A parameter input part 101 which sequentially inputs necessary parameters based in the order of process flows in semiconductor processed, an error information data base for respective processes 106, which stores error information between simulation on inputted parameter and a measured value for respective processes, a simulation error calculation part 102 for calculating the predicted value of deviation between the result of simulation on parameter inputted in the process flow of an object of simulation execution and the measured value based on error information stored in the error information data base for respective processes 106 and a display part 104 displaying the calculated result of the simulation error calculation part 102 or error information are provided. |
