| 摘要 |
PROBLEM TO BE SOLVED: To control a reference position for the rotator of a planar step motor with high accuracy. SOLUTION: Inside a fixing part 1 for forming the fixer of the plant step motor and a movable part 2 to move on two coordinates X and Y, reference points 3, 4, 5 and 6 are respectively arranged. The reference points 3 and 4 of the fixing part 1 are arranged corresponding to the reference points 5 and 6 of the movable part 2, and receivers for the reference positions are respectively arranged at the relevant members 1 and 2 so that the reference point 3 arranged at the member 1 can be correlated to the reference point 5 at the member 2 or the reference point 4 can be correlated to the reference point 6 inside the coincident position while being completely overlapped through the member 2. The reference point 3 is arranged on coordinates axes X and Y through a coordinate origin 0 on the member 1, at the position of this reference point, bores or recessed parts are prepared in the members 1 and 2 and in these parts, at least one light source or light receiving part is respectively arranged. |
