METHOD FOR FORMING A UNIFORM NETWORK OF SEMICONDUCTOR ISLANDS ON AN INSULATING SUBSTRATE
摘要
The invention concerns a method for forming a network of islands (124) of semiconductor material on an electric insulating surface (112), which consists in depositing nucleation seed crystals (112) on the electric insulating surface and in forming islands in semiconductor material on the nucleation seed crystals respectively. A distribution layer (116) of a material with a substantially uniform molecular structure is formed on the electric insulating material surface. The molecular structure of the distribution layer enables a uniform distribution of the nucleation seed crystals. The invention is useful for making a quantic structure such as one comprising a Coulomb barrier.
申请公布号
WO9933099(A1)
申请公布日期
1999.07.01
申请号
WO1998FR02769
申请日期
1998.12.17
申请人
COMMISSARIAT A L'ENERGIE ATOMIQUE;MARTIN, FRANCOIS;NUNZI, JEAN-MICHEL;MOUANDA, BRIGITTE;PALACIN, SERGE;BOURGOIN, JEAN-PHILIPPE