METHOD AND APPARATUS FOR CLEANING ELECTRONIC TEST CONTACTS

摘要

A method and device for cleaning an electrical contact (310a). Semiconductor testing device. Process of manufacturing integrated circuits. The method comprises directing electromagnetic radiation (210) at the contact. The electromagnetic energy reacts with at least one of the contact (310a) and the debris (314) so as to cause at least a portion of the debris (314) on the contact (310a) to be removed. The electromagnetic radiation (210) may comprise coherent radiation, such as electromagnetic radiation generated using a laser. According to one aspect of the invention, the contact (310a) comprises a conductive material and the electromagnetic radiation (210) causes removal of the portion of the debris (314) substantially without removal of the conductive material. According to another aspect of the invention, the electromagnetic radiation (210) at least partially melts the conductive material. In one preferred system, the contact (310a) comprises a probe tip. In such a system the probe tip may comprise the tip of a probe needle mounted to a probe card used for testing integrated circuits.