SEMICONDUCTOR WAFER INPUT/OUTPUT HANDLING SYSTEM

摘要

A processor (10) for processing articles, such as semiconductor wafers (50) includes an enclosure (12) defining a substantially enclosed clean processing chamber (20) and at least one processing station disposed in the processing chamber. An interface section (14) is disposed adjacent an interface end of the enclosure. The interface section includes at least one interface port through which a pod (51) containing articles for processing are loaded or unloaded to or from the processor. The interface section is hygienically separated from the processing chamber since the interface section is generally not as clean as the highly hygienic processing chamber. An article extraction mechanism adapted to seal with the pod is employed. The mechanism is disposed to allow extraction of the articles contained within the pod into the processing chamber without exposing the articles to ambient atmospheric conditions in the interface section. The article processor also preferably includes an article insertion mechanism that is adapted to seal with a pod disposed in the interface section.