APPARATUS AND METHOD FOR TESTING A DEVICE

摘要

An apparatus (20) for testing a device (26) including a plurality of elements (27) each having a contact surface (101) and a non-contact surface (102), the apparatus (20) comprising a base (21) for holding the device (26), the base (21) having a contact surface engageable with the contact surface (101) of each element (27), an actuator (23), a plurality of compliant members (28) carried by the actuator (23) to engage the non-contact surface (102) of each element (27), each compliant member (28) further including an aspect ratio of at least 1:1, and means (22) for exerting a force against the actuator (23), the aspect ratio for allowing the compliant members (28) to compensate for physical variations of the elements (27), provide compliance between the apparatus (20) and the elements (27) and substantial coplanarity between the contact surface (101) of each element and contact surface of the base (21) while allowing a sufficient focusing of force by the compliant members (28) against the non-contact surface (102) of each element (27) to provide contact between the contact surface (101) of each element and the contact surface of the base (21) without damaging the elements (27).