Optical precision measuring device for measuring various parameters of workpieces during manufacture
摘要
The device evaluates the two-dimensional Fresnel diffraction pattern which occurs in a distance sensor due to laser illumination of objects. Evaluation is performed with respect to rising gradient, attenuation, spatial frequency and height.
申请公布号
DE19758214(A1)
申请公布日期
1999.07.01
申请号
DE19971058214
申请日期
1997.12.31
申请人
HUHNKE, BURKHARD, DIPL.-ING., 38116 BRAUNSCHWEIG, DE
发明人
HUHNKE, BURKHARD, DIPL.-ING., 38116 BRAUNSCHWEIG, DE
