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发明名称
Stützelement eines automatischen Ladetisches einer Belichtungseinheit für Siliziumwafer
摘要
申请公布号
DE59408309(D1)
申请公布日期
1999.07.01
申请号
DE19945008309
申请日期
1994.11.22
申请人
PHILIPS PATENTVERWALTUNG GMBH, 22335 HAMBURG, DE
发明人
GAKIS, ANDREAS, C/O PHILIPS, D-20097 HAMBURG, DE;BUSSKAMP, RALPH, C/O PHILIPS, D-20097 HAMBURG, DE
分类号
G03F7/20;(IPC1-7):H01L21/00
主分类号
G03F7/20
代理机构
代理人
主权项
地址
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