发明名称 PROCESS AND APPARATUS FOR CONTROLLING THE GROWTH OF A CRYSTAL
摘要 The invention concerns a process and an apparatus for controlling the growth of a crystal, which growth is governed by a set of measurable and non-measurable variables. The process comprises the following steps: establishing an on-line simulation software working with a reduced number of variables, the reduction of variables being performed by using a projection algorithm; speeding up the on-line simulation software by generating data banks in which values of off-line precalculated variables are stored; tuning the on-line simulation software by adjusting the results predicted by on-line simulations to the results obtained by off-line simulations and by measurements; and establishing a control loop and controlling at least one of the variables in real time, the control loop using the speeded up and tuned on-line simulation software as an on-line observer.
申请公布号 KR100206520(B1) 申请公布日期 1999.07.01
申请号 KR19970027741 申请日期 1997.06.26
申请人 WACKER SILTRONIC GESELLSCHAFT FUR HALBLEITERMATERIALIEN AG 发明人 DORNBERGER, ERICH;VON AMMON, WILFRIED;OLKRUG, HANS;WASMEIER, FRANZ;DUPRET, FRANCOIS;WERTZ, VINCENT;VAN DEN BOGAERT, NATHALIE
分类号 C30B11/00;C30B13/28;C30B15/20;C30B29/06;C30B35/00;(IPC1-7):C30B15/20 主分类号 C30B11/00
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