Local analysis of organic substances adhering to a specimen e.g. a semiconductor wafer

摘要

In a system for analyzing organic substances adhering to a specimen (2), a section (2a) of the specimen surface to be analyzed is heated and the released gases are collected and analyzed. An analysis system, for organic substances adhering to a specimen (2), has (a) a heat system (8-11) for front or back heating of a specimen surface section (2a) to be analyzed in a chamber (1); (b) a gas collection system (6) connected to the chamber for collecting gases released from the specimen; and (c) an analyzer (7) for analyzing the collected gases. Independent claims are also included for the following: (i) a similar analysis system having a specimen heating system, a gas collection system (6) for separately collecting gases released from each section of the specimen and an analyzer (7) for analyzing the separately collected gases; and (ii) a method of analyzing organic substances adhering to each surface section of a specimen (2), comprising heating a specimen optionally locally at each surface section, collecting gases released from each specimen section and analyzing the gases for each section.