Printhead stress relief

摘要

The invention described in the specification relates to an ink jet printhead structure having semiconductor substrate (12) containing energy imparting devices for ejecting ink through nozzle holes in a nozzle plate (26), to a method for making a printhead structure and to a printer cartridge containing the printhead structure. In order to reduce stresses induced in the structure during manufacturing and/or use thereof, a polymeric layer (22) is disposed between the semiconductor substrate and nozzle plate which contains expansion void spaces or valleys sufficient to inhibit stresses in the structure during a process for bonding the nozzle plate to the polymeric layer thereby reducing misalignment and warpage problems associated with conventional printhead structures. <IMAGE>