| 摘要 |
The alignment system uses image detectors and activators to correct alignment of optical elements. The system comprises units (A1, A2, Am) for carrying out measurements representative of the shift of an image with respect to the optical axis of the equipment. The measurements may be carried out in pairs within specific measurement planes, located at the edges of the optical elements within the optical chain. A processing unit (UC) determines from these values the corresponding errors in positioning of optical elements. Correction signals are then produced in order to control activators (C1, C2, Cn) which automatically modify the positions of the optical elements to correct the alignment. |
