发明名称 |
Defect induced buried oxide (dibox) for throughput SOI |
摘要 |
<p>A method of fabricating a defect induced buried oxide (DIBOX) region in a semiconductor substrate utilizing a first low energy implantation step to create a stable defect region; a second low energy implantation step to create an amorphous layer adjacent to the stable defect region; oxidation and, optionally, annealing, is provided. Silicon-on-insulator (SOI) materials comprising said semiconductor substrate having said DIBOX is also provided herein. <IMAGE></p> |
申请公布号 |
EP0926725(A2) |
申请公布日期 |
1999.06.30 |
申请号 |
EP19980310584 |
申请日期 |
1998.12.22 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
SADANA, DEVENDRA KUMAR;DE SOUZA, JOEL P. |
分类号 |
H01L21/265;H01L21/762;(IPC1-7):H01L21/762 |
主分类号 |
H01L21/265 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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