Process and apparatus for producing oxide films and chemical vapor deposition,申请号EP19960104339-传众专利搜索

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发明名称	Process and apparatus for producing oxide films and chemical vapor deposition
摘要
申请公布号	EP0733721(B1)	申请公布日期	1999.06.30
申请号	EP19960104339	申请日期	1996.03.19
申请人	MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.	发明人	FUJII, EIJI;TOMOZAWA, ATSUSHI;TORII, HIDEO;TAKAYAMA, RYOICHI
分类号	C30B25/10;C23C16/40;C23C16/455;C23C16/50;C23C16/509;C30B25/16;(IPC1-7):C23C16/50;C23C16/44	主分类号	C30B25/10
代理机构		代理人
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