Apparatus and method for preparing organic EL devices

摘要

An apparatus for preparing organic EL devices includes a substrate (2) and an evaporation source (4). The source is disposed relative to the substrate such that the angle (&thetas;) included between the substrate surface and a line (A) connecting the center of an opening of the evaporation source and the center of the substrate is 20-60 DEG . The invention is effective for restraining the occurrence of current leakage and complies with substrates of a relatively large area. Organic EL devices can be efficiently produced on a mass scale. <IMAGE>