摘要 |
<p>Disclosed is a semiconductor memory having a hierarchical bit line and/or word line architecture. In one embodiment, a memory having a hierarchical bit line architecture, particularly suitable for cells smaller than 8F<2>, includes a master bit line pair in each column, including first and second master bit lines with portions vertically spaced from one another. The first and second master bit lines twist with respect to one another in the vertical direction such that the first master bit line alternately overlies and underlies the second master bit line. A plurality of local bit line pairs in each column are coupled to memory cells, with at least one of the local bit lines coupled to a master bit line. In other embodiments, hierarchical word line configurations are disclosed including master word lines, sub-master word lines, and local word lines, electrically interconnected to one another via either switches, electrical contacts, or electrical circuits. <IMAGE></p> |