发明名称 Process for controllably separating framed working area from remainder of the membrane
摘要 <p>Apparatus and a process for controllably separating a framed working area of a membrane from the remainder of the membrane is disclosed. The process includes tensioning an expanse of membrane material and fastening a support frame to the membrane to define a working portion of the same. A bondable polymeric material is applied to form a continuous border outward of the outer edge of the support frame. Additionally, the framed working area of the membrane is separated from the remainder of the membrane by cutting the membrane outward of the support frame.</p>
申请公布号 GR3029526(T3) 申请公布日期 1999.06.30
申请号 GR19990400621T 申请日期 1999.03.01
申请人 YEN, YUNG-TSAI 发明人 YEN, YUNG-TSAI
分类号 G03F1/84;G03F7/20;H01L21/00;(IPC1-7):H01L21/00 主分类号 G03F1/84
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