SPUTTERING FILM FORMING DEVICE,申请号JP19970338312-传众专利搜索

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发明名称	SPUTTERING FILM FORMING DEVICE
摘要
申请公布号	JPH11172435(A)	申请公布日期	1999.06.29
申请号	JP19970338312	申请日期	1997.12.09
申请人	SUMITOMO BAKELITE CO LTD	发明人	MARUYAMA HIRONORI
分类号	C23C14/34;C23C14/52;(IPC1-7):C23C14/52	主分类号	C23C14/34
代理机构		代理人
主权项
地址

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