发明名称 PRESSURIZING REGULATING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a pressurizing regulating device which can regulate the pressure of a workpiece against a tool in a wide range with a high degree of resolution. SOLUTION: A plurality of pressure control valves 5a, 5b, 5c having different control ranges of fluid pressure are incorporated, as pressure control valves for controlling the pressure of fluid fed into a fluid pressure cylinder 1 so as to regulate the pressurizing force applied to a piston 21 in a fluid pressure cylinder 1, and a required one of the plurality of pressure control valves 5a, 5b, 5c is selected in accordance with a pressurizing force required for the piston 21.
申请公布号 JPH11170138(A) 申请公布日期 1999.06.29
申请号 JP19970361666 申请日期 1997.12.11
申请人 NIKON CORP 发明人 MITOMI OSAMU;UEDA TERU
分类号 B23Q5/26;B24B41/06;F15B11/06 主分类号 B23Q5/26
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