| 摘要 |
To provide high purity gases to manufacturing tools, a gas isolation box is employed which is formed of stainless steel and includes vertical slots for receiving gas stick carrier cards. Gas sticks include required valves, gauges, and regulators rigidly mounted on stainless steel carrier cards, leak tested and labeled. The carrier cards with the rigidly mounted, leak tested gas sticks are slid into the vertical slots of the gas isolation box. Only two connections are then required to complete to gas lines, reducing the potential for flexing of high purity gas lines during installation.
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