发明名称 Profile measuring apparatus
摘要 A profile measuring apparatus provided with an improved probe for measuring profiles throughout a wide area of the surface of an object with a high level of response and high accuracy. The probe 10 comprises an arm 3 having a stylus 1 fixedly mounted to the distal end thereof, which is coupled to a stationary part 11 of the apparatus by an arm holding member 5 made of a V-shaped leaf spring in such a way that the arm 3 is tilted in one axial direction by a contact pressure exerted thereto during measurement. Displacement of the arm 3 is thereby detected through measuring an elastic deformation of the leaf spring caused by the contact pressure exerted to the stylus 1 being pressed against the surface to be measured.
申请公布号 US5917181(A) 申请公布日期 1999.06.29
申请号 US19970831080 申请日期 1997.04.01
申请人 MARSUSHITA ELECTRIC INDUSTRIAL, CO., LTD. 发明人 YOSHIZUMI, KEIICHI;KUBO, KEISHI;KUSUMOTO, SHOJI;UCHIMURA, KIYOKAZU;KANASHIMA, KEINOSUKE
分类号 G01B5/012;G01B11/00;G01B21/00;G01B21/20;(IPC1-7):G01B11/00 主分类号 G01B5/012
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