发明名称 Synchronization control apparatus and method
摘要 A master-slave synchronization control system is constructed having two drive systems for driving respective ones of two controlled objects capable of being operated individually, wherein the drive system having the slower response is adopted as the master and the drive system having the higher response is adopted as the slave. The drive system of the master, which has the elements of a velocity control system that operates to follow up an entered velocity command value, outputs velocity information and position information of its controlled object. The drive system of the slave has a velocity control system in which the velocity information is adopted as the velocity command value, and a position compensating loop in which the position information is adopted as a position command value. The position compensating loop adds the position compensation value to the velocity command value as a correction signal. Both drive systems are driven at a velocity conforming to the input velocity command value, with the positions of these drive systems being changed in synchronized fashion.
申请公布号 US5917294(A) 申请公布日期 1999.06.29
申请号 US19960705302 申请日期 1996.08.29
申请人 CANON KABUSHIKI KAISHA 发明人 MITARAI, REIJI
分类号 H01L21/027;G03F7/20;G03F9/00;G05D3/00;(IPC1-7):H01L21/30 主分类号 H01L21/027
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