| 摘要 |
PROBLEM TO BE SOLVED: To obtain the subject polymer capable of satisfying many performances as a resist material by introducing acid dissociating group into hydrogenated product of a ring-opened metathesis (co)polymer, controlling the molecular weight and controlling the molecular weight distribution to narrow dispersibility. SOLUTION: This polymer has a structural unit of formula I [R<1> is a group capable of dissociating by an acid; R<2> and R<3> are each H, a 1-20C alkyl, halogen or the like; (m) and (n) are each an integer of 1-3] and has 1.0-2.0 ratio (Mw,/Mn) of weight average molecular weight Mw to number average molecular weight Mn and 500-100,000 Mn measured by GPC, expressed in terms of polystyrene. The polymer having a structure of formula I can be obtained by polymerizing a cyclic olefinic monomer of formula II by using a living ring-opening metathesis catalyst, hydrogenating the resultant polymer in the presence of a hydrogenation catalyst, hydrolyzing at least one part of the acid anhydride group and further reacting the polymer with vinyl ethers orα,β-unsaturated ketones.
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