发明名称 |
Method and apparatus for temperature controlled spin-coating systems |
摘要 |
Disclosed is method and apparatus for distributing a chemical over the surface of a substrate. The method includes depositing the chemical on a portion of the surface of a substrate near the center of the substrate. The method further includes controlling the temperature of the surface of a substrate so that the viscosity of the chemical is calibrated to cause the chemical to be deposited on the surface of the substrate in a substantially uniform manner.
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申请公布号 |
US5916368(A) |
申请公布日期 |
1999.06.29 |
申请号 |
US19970807680 |
申请日期 |
1997.02.27 |
申请人 |
THE FAIRCHILD CORPORATION |
发明人 |
EBERT, ANDREAS |
分类号 |
B05C11/08;B05C11/10;G03F7/16;(IPC1-7):B05C21/00;B05B11/00;B23B5/22 |
主分类号 |
B05C11/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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