发明名称 Line narrowing device with double duty grating
摘要 A line narrowing system in which a polarizing beam splitter, a polarization rotator and a reflecting optic are configured to cause light in an expanded beam from a laser gain medium to illuminate a grating at least twice in each pass through the line narrowing system before returning to the gain medium for further amplification. In a preferred embodiment, the grating is an echelle grating arranged in a Littrow configuration.
申请公布号 US5917849(A) 申请公布日期 1999.06.29
申请号 US19970926946 申请日期 1997.09.10
申请人 CYMER, INC. 发明人 ERSHOV, ALEXANDER I.
分类号 G02B5/18;H01S3/08;H01S3/1055;H01S3/137;H01S3/139;H01S3/225;(IPC1-7):H01S3/08 主分类号 G02B5/18
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