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发明名称
SERVO VALVE
摘要
申请公布号
JPH11173305(A)
申请公布日期
1999.06.29
申请号
JP19970339813
申请日期
1997.12.10
申请人
SHIMADZU CORP
发明人
YANO AYUMI
分类号
G01B11/00;F15B9/09;F15B13/16;(IPC1-7):F15B13/16
主分类号
G01B11/00
代理机构
代理人
主权项
地址
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