A method and apparatus for the production of multilayer electrical components

摘要

A method and apparatus (1) for manufacturing multilayer electrical components (6) such as a multilayer ceramic capacitor. The layers are built up successively in a vacuum chamber (2) by a coating or film deposition process such as the commonly used thin film coating technology by using a spatially movable mechanical shadow mask (15). This enables the pattern to be changed from layer to layer without breaking the vacuum.