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摘要
申请公布号
JP2914328(B2)
申请公布日期
1999.06.28
申请号
JP19960314748
申请日期
1996.11.26
申请人
NIPPON DENKI KK
发明人
HATSUTORI WATARU
分类号
C01G1/00;C01G3/00;C23C14/08;C30B23/08;C30B29/22;H01L39/24;(IPC1-7):C30B29/22
主分类号
C01G1/00
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代理人
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