发明名称 INTEGRATED MATERIAL MANAGEMENT MODULE
摘要 A module for use in a system for processing articles, in which the system includes a plurality of machine tools for processing articles, a pod for carrying the articles to be processed by the machine tools from one machine tool to another, a host processing controller associated with the machine tools for controlling the operation thereof, a robot connected to each machine tool for receiving a pod, opening the pod and for transporting the articles from within the pod into position on the machine tool for processing. An identification means is carried by the pod for identifying a particular pod and the articles carried in the pod. The module includes a single wire connection between the identification means, the host controller and the robot. The module has microprocessor means to identify the source of a signal and means for routing the signal between the identification means and the host controller and between the host controller and the robot depending on its source.
申请公布号 WO9931713(A2) 申请公布日期 1999.06.24
申请号 WO1998IB02147 申请日期 1998.12.10
申请人 JENOPTIK AG 发明人 ELLIS, RAYMOND, W.;EXTINE, ANDREW, S.;HARDEE, BEDFORD, EUGENE;LEMCHAK, MICHAEL, RICHARD;SIMMONS, MICHAEL, C.
分类号 H01L21/677;G03F7/20;G05B19/418;H01L21/02 主分类号 H01L21/677
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