发明名称 |
INTEGRATED MATERIAL MANAGEMENT MODULE |
摘要 |
A module for use in a system for processing articles, in which the system includes a plurality of machine tools for processing articles, a pod for carrying the articles to be processed by the machine tools from one machine tool to another, a host processing controller associated with the machine tools for controlling the operation thereof, a robot connected to each machine tool for receiving a pod, opening the pod and for transporting the articles from within the pod into position on the machine tool for processing. An identification means is carried by the pod for identifying a particular pod and the articles carried in the pod. The module includes a single wire connection between the identification means, the host controller and the robot. The module has microprocessor means to identify the source of a signal and means for routing the signal between the identification means and the host controller and between the host controller and the robot depending on its source. |
申请公布号 |
WO9931713(A2) |
申请公布日期 |
1999.06.24 |
申请号 |
WO1998IB02147 |
申请日期 |
1998.12.10 |
申请人 |
JENOPTIK AG |
发明人 |
ELLIS, RAYMOND, W.;EXTINE, ANDREW, S.;HARDEE, BEDFORD, EUGENE;LEMCHAK, MICHAEL, RICHARD;SIMMONS, MICHAEL, C. |
分类号 |
H01L21/677;G03F7/20;G05B19/418;H01L21/02 |
主分类号 |
H01L21/677 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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