发明名称 PLATING DEVICE AND METHOD OF CONFIRMING CURRENT FEED
摘要 There are provided an electrical contact sensing means for sensing the electrical contact of current feed contacts with a current feed part of a substrate to be plated, and a plating device for forming a plating film with a uniform thickness by uniforming the plating current flowing through the current feed contacts. In the plating device, an anode (13) and a substrate (12) to be plated attached to a plating member are opposed in a plating bath, and the plating member has current feed contacts (15) in contact with the current feed part provided on the substrate. A predetermined voltage is applied between the current feed contacts (15) and the anode (13) to feed a plating current through the current feed contacts. Thus the substrate (12) is plated. The plating device includes an electrical contact sensing means (22) for sensing the electrical contact of the current feed contacts of the plating member with the current feed part of the substrate (12).
申请公布号 WO9931304(A1) 申请公布日期 1999.06.24
申请号 WO1998JP05672 申请日期 1998.12.16
申请人 EBARA CORPORATION;YOSHIOKA, JUNICHIRO;SENDAI, SATOSHI;CHONO, ATSUSHI;TADA, MITSUO;HONGO, AKIHISA;MUKAIYAMA, YOSHITAKA;TOMIOKA, KENYA;OGATA, AKIRA;SUZUKI, KENICHI;OZAWA, NAOMITSU 发明人 YOSHIOKA, JUNICHIRO;SENDAI, SATOSHI;CHONO, ATSUSHI;TADA, MITSUO;HONGO, AKIHISA;MUKAIYAMA, YOSHITAKA;TOMIOKA, KENYA;OGATA, AKIRA;SUZUKI, KENICHI;OZAWA, NAOMITSU
分类号 C25D21/12;G01R31/02;(IPC1-7):C25D17/08;C25D5/08;G01R27/02 主分类号 C25D21/12
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