申请人 |
EBARA CORPORATION;YOSHIOKA, JUNICHIRO;SENDAI, SATOSHI;CHONO, ATSUSHI;TADA, MITSUO;HONGO, AKIHISA;MUKAIYAMA, YOSHITAKA;TOMIOKA, KENYA;OGATA, AKIRA;SUZUKI, KENICHI;OZAWA, NAOMITSU |
发明人 |
YOSHIOKA, JUNICHIRO;SENDAI, SATOSHI;CHONO, ATSUSHI;TADA, MITSUO;HONGO, AKIHISA;MUKAIYAMA, YOSHITAKA;TOMIOKA, KENYA;OGATA, AKIRA;SUZUKI, KENICHI;OZAWA, NAOMITSU |