| 摘要 |
<p>An open/close valve construction for use in solid-state fluid transport circuits having discrete fluid passageways (12a, 13a, 20) formed in rigid substrates (53, 56, 57) with a substrate land (58) between port regions of the fluid passageways. The valve construction comprises a diaphragm disk (60) having a dome portion overlying the substrate land (58) and port regions and having a self-restoring resilience sufficient to maintain its dome configuration against substantial line vacuum. A valve actuator (21) is located above the dome portion and spring biased (22) to compress the dome into a flat configuration closing the port regions. Means for negating the spring force are provided to allow the dome portion to restore its configuration and open the valve.</p> |
