ELECTRONIC DEVICE INSPECTION SYSTEM AND METHOD FOR MANUFACTURING ELECTRONIC DEVICE USING THE SAME

摘要

An electronic device inspection system which can solve the conventional problem by highly reliably notifying the occurrence of abnormality on a production line by using innovative information. The inspection system is provided with an analyzer having an inspection device which detects the defect of the same work processed in at least first and second processing steps of a plurality of processing steps among a plurality of works which are processed into an electronic device in the plurality of processing steps, a storing means which stores the inspection data detected by means of the inspection device, a calculating means which calculates the number of the defects which occur at nearly the same defect positions of a work processed in the first processing step as defect positions of a work processed in the second processing step by using the stored inspection data, and an outputting means which outputs in time series the calculated results of the calculating means in the order of the works processed in the first or second processing step.