发明名称 |
Detector assembly for a scanning electron microscope |
摘要 |
<p>Electron detector configuration for an environmental scanning electron microscope (ESEM), for detecting electrons emanating from the surface of the specimen. The detecting means comprise a printed circuit board (132) including a detector head (134) having thereon an electrically biased ring detector electrode (136), the ring electrode being disposed between the specimen (24) and a pressure limiting aperture (144) that is positioned at the interface of the vacuum column (10) and the specimen chamber (22). The pressure limiting aperture is preferably provided with means for electrically biassing it such that it can act as an electrically biased pressure limiting aperture detector, and it is preferably formed integrally on the printed circuit board (132). <IMAGE></p> |
申请公布号 |
EP0924743(A1) |
申请公布日期 |
1999.06.23 |
申请号 |
EP19990200725 |
申请日期 |
1994.07.25 |
申请人 |
PHILIPS ELECTRONICS NORTH AMERICA CORPORATION |
发明人 |
KNOWLES, RALPH W.;SCHULTZ, WILLIAM G.;ARMSTRONG, ALLEN E. |
分类号 |
H01J37/256;H01J37/18;H01J37/22;H01J37/244;H01J37/28;(IPC1-7):H01J37/256 |
主分类号 |
H01J37/256 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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