Aluminum nitride sintered body, electronic functional material, and electrostatic chuck

摘要

An aluminum nitride sintered body comprising aluminum nitride crystal grains, in which the grains have a content of a rare earth element (a conversion content as an oxide thereof) of 0.05-0.5% by weight, an average grain size of not more than 3 mu m, and a spin amount per unit mg of aluminum obtained from a spectrum as measured by an electron spin resonance method of not more than 5 x 10<12> spins/mg. The aluminum nitride sintered body is used in an electronic functional material and an electrostatic chuck. It has relatively small temperature dependence of its resistivity.