发明名称 |
Method and system for measuring particles in a liquid sample |
摘要 |
Provided are a method and apparatus for measuring particles in a liquid sample. The method involves introducing a liquid sample into a heat exchanger, thereby cooling the sample to a predetermined temperature. A particle measurement is performed on the cooled sample by introducing the cooled sample into a particle detector. The method and apparatus in accordance with the invention effectively suppress bubbles present in a liquid chemical sample being measured, thereby allowing for accurate particle measurements. The invention has particular applicability in the semiconductor and pharmaceutical manufacturing industries. <IMAGE> |
申请公布号 |
EP0924506(A1) |
申请公布日期 |
1999.06.23 |
申请号 |
EP19980403174 |
申请日期 |
1998.12.16 |
申请人 |
L'AIR LIQUIDE, SOCIETE ANONYME POUR |
发明人 |
XU, MINDI;LI, WEICHING |
分类号 |
G01N15/00;G01N1/00;G01N15/02;G01N21/05;H01L21/306 |
主分类号 |
G01N15/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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